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U.S. Department of Energy
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Plasma etchback of multilayer printed wiring boards

Technical Report ·
DOI:https://doi.org/10.2172/5256047· OSTI ID:5256047

Removal of epoxy smear and glass fiber protrusions in multilayer printed wiring board holes was investigated. Gas plasma techniques, using a mixture of carbon tetrafluoride and oxygen, removed the eposies; however, the glass fibers were not affected.

Research Organization:
Bendix Corp., Kansas City, MO (USA)
DOE Contract Number:
AC04-76DP00613
OSTI ID:
5256047
Report Number(s):
BDX-613-2458
Country of Publication:
United States
Language:
English