Using the modulating ion current gauge for total pressure measurements below 10/sup -10/ Torr without errors caused by electron-stimulated ion desorption

Journal Article · Sun Jan 01 04:00:00 EST 1984 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572624· OSTI ID:5246904

Watanabe, F; Hiramatsu, S; Ishimaru, H

Total pressure measurements below 10/sup -10/ Torr, in an active residual gas, were made using a special hot-cathode ionization gauge, without errors caused by electron-stimulated ion desorption. The gauge can separate the two ion signals, i.e., the signal created from gas phase molecules and that from electron-stimulated ion desorption, by using a new modulation and amplification system. In order to verify this separation effect, experiments were made with oxygen and nitrogen introduction in the 10/sup -10/ Torr range.

• Research Organization: Sakuran-no-seibo Gakuin High School, Ohgida, Noda-machi, Fukushima-shi, 960, Japan
• OSTI ID: 5246904
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 2:1; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420700* -- Engineering-- Vacuum Engineering-- (-1987)
43 PARTICLE ACCELERATORS
430400 -- Particle Accelerators-- Storage Rings
CATHODES
CHARGED PARTICLES
COLLISIONS
CURRENTS
DESIGN
DESORPTION
ELECTRIC CURRENTS
ELECTRODES
ELECTRON COLLISIONS
ELEMENTS
IONIZATION GAGES
IONS
MEASURING INSTRUMENTS
NITROGEN
NONMETALS
OPERATION
OXYGEN
PERFORMANCE TESTING
PRESSURE GAGES
PRESSURE MEASUREMENT
STORAGE RINGS
TESTING
ULTRAHIGH VACUUM
VACUUM GAGES