Preparation and properties of RF-sputtered films in the PbO-Nb/sub 2/O/sub 5/ system

Journal Article · Sat Jul 01 04:00:00 EDT 1989 · Materials Research Bulletin; (USA)

DOI:https://doi.org/10.1016/0025-5408(89)90043-3· OSTI ID:5246753

Sekiya, T; Tsuzuki, A; Kawakami, S; Torii, Y ^[1]

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1. Government Industrial Research Inst., Nagoya (Japan)

The PbO-Nb/sub 2/O/sub 5/ films were prepared by rf-sputtering from powder targets with up to 50% Nb/sub 2/O/sub 5/ onto slide glass or vycor glass substrate in the range of water temperature to 300{sup 0}C. In the PbO films sputtered on slide glass, amorphous phase, mixed phase of massicot and litharge and cubic phase which seems to have zinc blend structure were obtained in that order with increasing the substrate temperature. The PbO films sputtered on vycor glass always consisted of massicot and litharge at the temperatures attempted. In the PbO-Nb/sub 2/O/sub 5/ films deposited on vycor glass, two kinds of phases were produced: amorphous phase and cubic phase. Most of the sputtered films showed a certain instability to crystallize or transform into the other phase assemblage on annealing at higher temperatures.

• OSTI ID: 5246753
• Journal Information: Materials Research Bulletin; (USA), Journal Name: Materials Research Bulletin; (USA) Vol. 24:7; ISSN MRBUA; ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
CHALCOGENIDES
CHEMICAL PREPARATION
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
ELEMENTS
FILMS
GLASS
HIGH TEMPERATURE
LEAD COMPOUNDS
LEAD OXIDES
NIOBIUM COMPOUNDS
NIOBIUM OXIDES
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
POWDERS
REFRACTORY METAL COMPOUNDS
RF SYSTEMS
SPUTTERING
SUBSTRATES
SYNTHESIS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS