Ion source based on the cathodic arc

Patent · Tue Feb 01 00:00:00 EST 1994

OSTI ID:5239092

Sanders, D M; Falabella, S

A cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated, is described. An array of electrically isolated rings positioned in the source serves the dual purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles. 3 figures.

• DOE Contract Number: W-7405-ENG-48
• Assignee: Dept. of Energy, Washington, DC ()
• Patent Number(s): US 5282944; A
• Application Number: PPN: US 7-921779
• OSTI ID: 5239092
• Resource Relation: Patent File Date: 30 Jul 1992
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
Ta
ION SOURCES
DESIGN
BAFFLES
ELECTRIC FIELDS
ELECTRICAL INSULATION
CONTROL EQUIPMENT
EQUIPMENT
FLOW REGULATORS
661220* - Particle Beam Production & Handling
Targets- (1992-)