An ion source based on the cathodic arc

Patent Application · Thu Dec 31 00:00:00 EST 1992

OSTI ID:10171303

Sanders, D M; Falabella, S

This invention is comprised of a cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the duel purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.

• Research Organization: Lawrence Livermore National Lab., CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Dept. of Energy
• Patent Number(s): PATENTS-US-A7921779
• Application Number: ON: DE94016129; PAN: 7-921,779
• OSTI ID: 10171303
• Resource Relation: Other Information: PBD: 1992
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ION SOURCES
DESIGN
SPRAY COATING
INVENTIONS
CONFIGURATION
SYMMETRY
360101
661220
PREPARATION AND FABRICATION
PARTICLE BEAM PRODUCTION AND HANDLING
TARGETS