Oxidation of amorphous Ni--Nb films: Surface spectroscopy studies

Journal Article · Sun May 01 04:00:00 EDT 1988 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575029· OSTI ID:5221752

Christensen, T M

Sputter deposited amorphous Ni--Nb alloy films have been proposed as thin-film metallization layers for high-temperature (>300 /sup 0/C) compound semiconductor applications. We have used x-ray photoelectron spectroscopy (XPS) to investigate the oxidation behavior of 1-..mu..m-thick, sputter deposited, amorphous Ni/sub 60/ Nb/sub 40/ films exposed to oxygen or room air at temperatures in the range 30--500 /sup 0/C for times of 5 min to 45 h. The initial stages of oxidation were examined in situ at oxygen partial pressures below 1 x 10/sup -6/ Torr. At all temperatures, Nb/sub 2/ O/sub 5/ formed on the surface; this remained the dominant corrosion product for specimens oxidized in air for 45 h at temperatures up to 200 /sup 0/C. Angle-resolved XPS measurements indicated that a thin (5--10 A) NiO layer formed on the surface of the Nb/sub 2/ O/sub 5/ after long exposures at these temperatures. Specimens oxidized at temperatures above 240 /sup 0/C, however, quickly developed a thick (>100 A), crystalline NiO layer on top of the Nb/sub 2/O/sub 5/.

• Research Organization: Corrosion Division 1841, Sandia National Laboratories, Albuquerque, New Mexico 87185
• OSTI ID: 5221752
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360106* -- Metals & Alloys-- Radiation Effects
ALLOYS
AMORPHOUS STATE
CHALCOGENIDES
CHEMICAL REACTIONS
CORROSION
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
FILMS
HIGH TEMPERATURE
HIGH VACUUM
IONIZING RADIATIONS
MEDIUM TEMPERATURE
NICKEL ALLOYS
NICKEL BASE ALLOYS
NIOBIUM ALLOYS
NIOBIUM COMPOUNDS
NIOBIUM OXIDES
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
RADIATIONS
REFRACTORY METAL COMPOUNDS
SPECTROSCOPY
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
X RADIATION