Optical waveguide fabrication by stoichiometric implantation of Ti and O into LiNbO sub 3

Conference · Wed Nov 01 00:00:00 EST 1989

OSTI ID:5211557

Poker, D B ^[1]; Xia, W ^[2]

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1. Oak Ridge National Lab., TN (USA)
2. California Univ., San Diego, La Jolla, CA (USA). Dept. of Electrical Engineering

X-cut substrates of LiNbO{sub 3} have been implanted at 500{degree}C with Ti and O to doses of 2.5 and 7.5 {times} 10{sup 17} ions/cm{sup 2}, respectively. The high substrate temperature during implantation ensures dynamic recrystallization, preserving the crystallinity of the LiNbO{sub 3}. The stability of the stoichiometric implants is enhanced sufficiently that annealing at 1000{degree}C proceeds with no surface degradation of the substrate. Annealing under identical conditions without the O implant usually results in phase separation of an oxide at the surface, even when annealing is performed immediately following implantation. Samples implanted with Ti and O to preserve the stoichiometric metal:oxygen ratio of the substrate can be stored at room temperature for several months without phase separation. Planar optical waveguides have been produced by stoichiometric implantation followed by annealing in water-saturated oxygen for one hour at temperatures of 900 and 1000{degree}C. The sample annealed at 900{degree}C supported a single lossy mode, while the 1000{degree}C sample supported two propagating modes and one lossy mode at {lambda} = 0.6 {mu}m. 7 refs., 5 figs.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: DOE/ER
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5211557
• Report Number(s): CONF-891119-45; ON: DE90004238
• Resource Relation: Conference: Materials Research Society fall meeting, Boston, MA (USA), 27 Nov - 2 Dec 1989
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
47 OTHER INSTRUMENTATION
WAVEGUIDES
FABRICATION
ION IMPLANTATION
LITHIUM COMPOUNDS
NIOBIUM COMPOUNDS
OPTICAL EQUIPMENT
OXIDES
OXYGEN
STOICHIOMETRY
TITANIUM
WAVE PROPAGATION
ALKALI METAL COMPOUNDS
CHALCOGENIDES
ELEMENTS
EQUIPMENT
METALS
NONMETALS
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
360601* - Other Materials- Preparation & Manufacture
440600 - Optical Instrumentation- (1990-)