Optical properties of stoichiometric LiNbO{sub 3} waveguides formed by low-dose oxygen ion implantation

Journal Article · Mon Jan 24 04:00:00 EST 2005 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.1854202· OSTI ID:20636962

Xuelin, Wang; Keming, Wang; Feng, Chen; Gang, Fu; Shiling, Li; Hong, Liu; Lei, Gao; Dingyu, Shen; Hongji, Ma; Rui, Nie ^[1]

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1. Department of Physics, Shandong University, Jinan 250100 (China)

The planar waveguides in z-cut stoichiometric LiNbO{sub 3} crystal have been fabricated by 3.0 MeV oxygen ion implantation with the dose of 6x10{sup 14} ions/cm{sup 2} at room temperature. The modes of the waveguides were measured by the prism-coupling method with the wavelength 633 and 1539 nm, respectively. The refractive index profiles of the waveguides were reconstructed using reflectivity calculation method. The Rutherford backscattering/channeling technique was used to investigate the damage produced by the ion implantation, the minimum yield of the spectra was 4.52%. The propagation loss of waveguide was 0.61 dB/cm obtained by fiber probe technique. It was found that positive changes of extraordinary refractive indices happened in the guiding regions, and such change increased after the annealing treatment at 260 deg. C for 60 min.

• OSTI ID: 20636962
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 4 Vol. 86; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
CALCULATION METHODS
CRYSTALS
ION BEAMS
ION IMPLANTATION
LITHIUM COMPOUNDS
MEV RANGE 01-10
NIOBATES
NIOBIUM OXIDES
OXYGEN IONS
REFLECTIVITY
REFRACTIVE INDEX
RUTHERFORD BACKSCATTERING SPECTROSCOPY
STOICHIOMETRY
TEMPERATURE RANGE 0273-0400 K
WAVEGUIDES