Time-resolved ellipsometry

Journal Article · Sun Sep 15 04:00:00 EDT 1985 · Appl. Opt.; (United States)

DOI:https://doi.org/10.1364/AO.24.002948· OSTI ID:5204955

Jellison, Jr, G E; Lowndes, D H

An ellipsometer is described which is capable of measuring one of the related ellipsometric parameters N, S, or C as a function of time. The ellipsometer is of the standard polarizer-compensator-sample-analyzer type, in which the analyzer is a Wollaston prism. An analysis is presented of the errors resulting from misalignment of the azimuths of the various elements from an incorrect phase shift of the compensator and from sample surface effects. The time resolution of the ellipsometer is limited only by the rise time of the photodetector and by the digitization rate of the data acquisition system. Picosecond time resolution is possible, in principle, using a streak camera as both detector and digitizer. Submicrosecond operation of the time-resolved ellipsometer is demonstrated in a study of pulsed excimer laser cleaning of a silicon surface in air.

• Research Organization: Oak Ridge National Laboratory, Solid State Division, P. O. Box X, Oak Ridge, Tennessee 37831
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5204955
• Journal Information: Appl. Opt.; (United States), Journal Name: Appl. Opt.; (United States) Vol. 24:18; ISSN APOPA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
DATA ACQUISITION
DESIGN
ELLIPSOMETERS
ELLIPSOMETRY
MEASURING INSTRUMENTS
MEASURING METHODS
OPERATION
PARAMETRIC ANALYSIS
POLARIMETERS
RESOLUTION
TIME RESOLUTION
TIMING PROPERTIES