Diagnostics of glow discharges used to produce hydrogenated amorphous silicon films: Annual subcontract report, 15 April 1986-14 June 1987
This report presents results of research done to measure the neutral species produced in silane, silane-hydrogen, disilane, disilane-hydrogen, germane, germane-hydrogen, and silane-germane discharges. Interpretation and modeling of the data in terms of discharge chemistry are also desirable. Mass-spectrometric measurements were made of the stable gases flow through and produced in silane, disilane, and silane-germane discharges. From these observations, the discharge stoichiometry was determined and the reaction pathways that lead to film deposition clarified. The importance of one processing parameter (powerflow) is explained, and a high ratio of germanesilane depletion in mixed-gas discharges is identified. A calculation of radical deposition in pure silane discharges shows the dominance of SiH/sub 3/ deposition at low powers and suggests the reason (surface mobility) why this produced good-quality films. Measurements of postdeposition sputtering of a-Si:H films were important in understanding and modeling the deposition reactions as well as the high-rate deposition method was also developed and studied.
- Research Organization:
- National Bureau of Standards, Boulder, CO (USA); Colorado Univ., Boulder (USA)
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 5202744
- Report Number(s):
- SERI/STR-211-3288; ON: DE88001151
- Country of Publication:
- United States
- Language:
- English
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Diagnostics of a glow discharge used to produce hydrogenated amorphous silicon films. Final subcontract report
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Related Subjects
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
140505* -- Solar Energy Conversion-- Photochemical
Photobiological
& Thermochemical Conversion-- (1980-)
AMORPHOUS STATE
DIAGNOSTIC TECHNIQUES
DIRECT ENERGY CONVERTERS
DOCUMENT TYPES
ELECTRIC DISCHARGES
EQUIPMENT
FILMS
GLOW DISCHARGES
MASS SPECTROSCOPY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PROGRESS REPORT
RESEARCH PROGRAMS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTROSCOPY
THIN FILMS