Deposition of silicon carbide coatings on particles in a fluidized bed using silane and tetramethylsilane: a feasibility study

Technical Report · Wed Mar 01 00:00:00 EST 1978

DOI:https://doi.org/10.2172/5193588· OSTI ID:5193588

Federer, J. I.

Deposition of silicon carbide (SiC) coatings from compounds such as methyltrichlorosilane (CH/sub 3/SiCl/sub 3/) results in corrosive chlorine-containing byproducts. The feasibility of depositing coatings from SiH/sub 4/ and Si(CH/sub 3/)/sub 4/, which contain no chlorine, was briefly studied. Coatings of SiC were deposited from Si(CH/sub 3/)/sub 4/ over the temperature range 1025 to 1525/sup 0/C in beds of particles fluidized with either H/sub 2/ or Ar. The densest coatings were deposited at 1025/sup 0/C, but none approached the theoretical density of SiC. A SiC coating was also deposited at 800/sup 0/C from a mixture of SiH/sub 4/, C/sub 2/H/sub 4/, and H/sub 2/.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: W-7405-ENG-26
• OSTI ID: 5193588
• Report Number(s): ORNL/TM-6185; TRN: 78-008250
• Country of Publication: United States
• Language: English

Related Subjects

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS
36 MATERIALS SCIENCE
SILICON CARBIDES
DEPOSITION
COATED FUEL PARTICLES
COATINGS
FEASIBILITY STUDIES
FLUIDIZED BED
HTGR TYPE REACTORS
SILANES
SURFACE COATING
CARBIDES
CARBON COMPOUNDS
FUEL PARTICLES
GAS COOLED REACTORS
GRAPHITE MODERATED REACTORS
HYDRIDES
HYDROGEN COMPOUNDS
REACTORS
SILICON COMPOUNDS
050700* - Nuclear Fuels- Fuels Production & Properties
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360601 - Other Materials- Preparation & Manufacture