Excimer laser technology for soft x-ray generation

Book · Sat Dec 31 00:00:00 EST 1994

OSTI ID:51817

Powers, M F; Shields, H ^[1]

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1. Jamar Technology Co., San Diego, CA (United States)

An angularly-multiplexed XeCl excimer laser system, generating pulses of 4-5 ns duration, has been used to investigate soft x-ray generation from laser-produced plasmas. For applications in x-ray lithography, the spectral regions of 10--15 {angstrom} and around 135 {angstrom} have been studied. A laser to x-ray conversion efficiency of 5.5% and an x-ray power of >1 W into 2{pi} steradians have been demonstrated in the shorter wavelength band. At the longer wavelength, the effects of laser intensity and plasma recombination on conversion efficiency have been studied.

• OSTI ID: 51817
• Report Number(s): CONF-940142-; ISBN 0-8194-1408-5; TRN: IM9524%%285
• Resource Relation: Conference: OE/LASE `94: conference on optics, electro-optics, and laser applications in science and engineering, Los Angeles, CA (United States), 22-29 Jan 1994; Other Information: PBD: 1994; Related Information: Is Part Of Visible and UV lasers. SPIE Volume 2115; Scheps, R. [ed.]; PB: 293 p.
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
LASER-PRODUCED PLASMA
SOFT X RADIATION
INTEGRATED CIRCUITS
FABRICATION
X-RAY SOURCES
DESIGN
EXCIMER LASERS
LASER RADIATION
USES
PERFORMANCE
MASKING
EXPERIMENTAL DATA