Excimer laser technology for soft x-ray generation
Book
·
OSTI ID:51817
- Jamar Technology Co., San Diego, CA (United States)
An angularly-multiplexed XeCl excimer laser system, generating pulses of 4-5 ns duration, has been used to investigate soft x-ray generation from laser-produced plasmas. For applications in x-ray lithography, the spectral regions of 10--15 {angstrom} and around 135 {angstrom} have been studied. A laser to x-ray conversion efficiency of 5.5% and an x-ray power of >1 W into 2{pi} steradians have been demonstrated in the shorter wavelength band. At the longer wavelength, the effects of laser intensity and plasma recombination on conversion efficiency have been studied.
- OSTI ID:
- 51817
- Report Number(s):
- CONF-940142--; ISBN 0-8194-1408-5
- Country of Publication:
- United States
- Language:
- English
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