Effects of heat treatment on the optical and electrical properties of indium--tin oxide films

Journal Article · Sun Jan 01 04:00:00 EST 1978 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.324386· OSTI ID:5163474

Haines, W G; Bube, R H

The effect of heat treatment in various environments on the electrical and optical properties of indium--tin oxide (ITO) sputtered films has been investigated. As the resistivity is decreased by heat treatment in H/sub 2/ from 8.3 x 10/sup -3/ to 4.3 x 10/sup -4/ ..cap omega.. cm, the optical band gap increases from 3.05 to 3.42 eV consistent with a Burstein shift and intrinsic band gap of 2.98 eV, and for resistivities less than 8.3 x 10/sup -4/ ..cap omega.. cm there is a rapid decrease in transmission at longer wavelengths due to free-carrier absorption and formation of dendritic precipitates. Careful control over all sputtering variables is essential to obtain reproducible properties.

• Research Organization: Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
• OSTI ID: 5163474
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 49:1; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
CHALCOGENIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ENERGY GAP
FILMS
HEAT TREATMENTS
INDIUM COMPOUNDS
INDIUM OXIDES
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
TIN COMPOUNDS
TIN OXIDES