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U.S. Department of Energy
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Makeup air systems energy-saving opportunities

Conference · · ASHRAE Transactions (American Society of Heating, Refrigerating and Air-Conditioning Engineers); (United States)
OSTI ID:5162715
 [1]
  1. Anderson DeBartolo Pan, Inc., Tucson, AZ (US)
Makeup air semiconductor clean spaces can vary from 1 cfm/ft{sup 2} (5.08 L/s {center dot} m{sup 2}) to 10 cfm/ft{sup 2} (50.81 L/s {center dot} m{sup 2}) and typically averages 5 cfm/ft{sup 2} (25.4 L/s {center dot} m {sup 2}). Accordingly, the energy requirements to cool, dehumidify, preheat, and/or humidify are significant and can represent 30% to 65% of the total thermal energy required to maintain a cleanroom environment. Because of high energy requirements, cost-effective means to reduce energy costs can influence unit production costs. The greatest opportunity for significant energy savings can be achieved by reducing or displacing mechanical cooling or fuel-generated heating requirements. The primary focus of this paper is to present and discuss various concepts of heat recovery, dual-temperature cooling, direct and indirect evaporative cooling, and heat rejection directed toward makeup air systems that can achieve these objectives. In addition, equipment-sizing considerations not necessarily applicable to systems that are less energy intensive or that operate continuously are explored.
OSTI ID:
5162715
Report Number(s):
CONF-9006117--
Conference Information:
Journal Name: ASHRAE Transactions (American Society of Heating, Refrigerating and Air-Conditioning Engineers); (United States) Journal Volume: 96:2
Country of Publication:
United States
Language:
English