Leak calibration by the. Delta. P. Delta. V and pressure difference techniques
- Oak Ridge Y-12 Plant, Martin Marietta Energy Systems, Inc., Oak Ridge, Tennessee (USA)
Two techniques for calibrating leaks, one primary and one secondary, are described. The {Delta}{ital P}{Delta}{ital V} method, a primary technique, is a modification of the {ital P}{Delta}{ital V} technique which requires less time, has smaller outgassing error, and allows simultaneous, automated calibrations of several leaks in the range 10{sup {minus}8}--10{sup {minus}12} mol s{sup {minus}1}. The pressure difference method is a comparison technique in which a mass spectrometer is used to compare the partial pressure of gas collected from the leak being calibrated to a known partial pressure generated by a constant flow. It is useful for calibrations in the 10{sup {minus}12}--10{sup {minus}15} mol s{sup {minus}1} range. Both methods have been incorporated in an automated apparatus.
- OSTI ID:
- 5156336
- Journal Information:
- Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Vol. 9:6; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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