Stepped linear piston displacement fundamental leak calibration system
A fundamental leak calibration apparatus has been developed that measures gas leak rates. The stepped linear piston displacement (SLIPD) system decreases the calibration time for leaks in the 10/sup -11/--10/sup -6/ mol/s (2 x 10/sup -7/--2 x 10/sup -2/ atm cm/sup 3//s at 0 /sup 0/C) range without increasing the uncertainty when compared to other related techniques. Calibration times have been reduced by up to a factor of 10 (depending on the leak rate) over the current P ..delta..V system used by the Sandia Primary Standards Laboratory for more than four years. The SLIPD system is computer controlled and requires minimal operator input. Furthermore, the total systematic uncertainty of < +- 1.1% (from 10/sup -10/ to 10/sup -6/ mol/s) is roughly the same as that for a P ..delta..V system and intercomparisons between the two systems for the same leaks agree to better than +- 1.0%.
- Research Organization:
- Sandia National Laboratories, Albuquerque, New Mexico 87185
- OSTI ID:
- 6973330
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Vol. 6:4
- Country of Publication:
- United States
- Language:
- English
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