Bi-Sr-Ca-Cu-oxide superconducting thin films deposited by dc magnetron sputtering

Journal Article · Mon Jun 06 00:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99598· OSTI ID:5132008

Sullivan, B T; Osborne, N R; Hardy, W N; Carolan, J F; Yang, B X; Michael, P J; Parsons, R R

Thin films of the high-temperature superconductor Bi-Sr-Ca-Cu-oxide were deposited by dc magnetron sputtering onto various substrates. Films deposited on (100) MgO substrates achieved zero resistance between 78 and 82.5 K depending upon the annealing conditions. The best films were produced with a quick post-anneal in oxygen at 870 /sup 0/C followed by a slower anneal in air at the same temperature. The composition of the sputtered films was uniform within +- 3% over an area 40 mm in radius, and films deposited at 15 and 40 mm from the center of deposition both exhibited high T/sub c/ transitions.

• Research Organization: Department of Physics, University of British Columbia, Vancouver, B. C. V6T 2A6, Canada
• OSTI ID: 5132008
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 52:23
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BISMUTH OXIDES
CHEMICAL COMPOSITION
SPUTTERING
TRANSITION TEMPERATURE
CALCIUM OXIDES
COPPER OXIDES
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
FABRICATION
MAGNESIUM OXIDES
MAGNETRONS
THIN FILMS
VAPOR DEPOSITED COATINGS
ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
CALCIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
MAGNESIUM COMPOUNDS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication