Bi-Sr-Ca-Cu-oxide superconducting thin films deposited by dc magnetron sputtering
Journal Article
·
· Appl. Phys. Lett.; (United States)
Thin films of the high-temperature superconductor Bi-Sr-Ca-Cu-oxide were deposited by dc magnetron sputtering onto various substrates. Films deposited on (100) MgO substrates achieved zero resistance between 78 and 82.5 K depending upon the annealing conditions. The best films were produced with a quick post-anneal in oxygen at 870 /sup 0/C followed by a slower anneal in air at the same temperature. The composition of the sputtered films was uniform within +- 3% over an area 40 mm in radius, and films deposited at 15 and 40 mm from the center of deposition both exhibited high T/sub c/ transitions.
- Research Organization:
- Department of Physics, University of British Columbia, Vancouver, B. C. V6T 2A6, Canada
- OSTI ID:
- 5132008
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:23; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COMPOSITION
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COMPOSITION
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS