High-power radio-frequency plasma source

Journal Article · Wed Oct 01 04:00:00 EDT 1986 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1139086· OSTI ID:5131063

Petty, C C; Smith, D K

A high-power radio-frequency plasma source was built and tested for an antenna frequency of 2.45 MHz. A puff valve fed hydrogen gas into a plasma chamber made from 4-in.-diam Pyrex tubing. A helical antenna was wound directly around this chamber. The plasma source was surrounded by a magnetic bucket which used a longitudinal line-cusp geometry. For 20 kW of RF input power, the peak electron density was 2.0 x 10/sup 19/ m/sup -3/, the electron temperature was 2.0 eV, the ion temperature was 0.9 eV, and the atomic hydrogen density was 4.4 x 10/sup 19/ m/sup -3/. For 90 kW of RF input power, the peak electron density was 8.9 x 10/sup 19/ m/sup -3/, the electron temperature was 2.5 eV, the ion temperature was 3.0 eV, and the atomic hydrogen density was 2.3 x 10/sup 19/ m/sup -3/. The plasma source had a typical current efficiency of 6 A/kW. A theoretical model for the plasma loading resistance was developed.

• Research Organization: Plasma Fusion Center, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
• OSTI ID: 5131063
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 57:10; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700106* -- Fusion Energy-- Plasma Research-- Plasma Production-- (-1987)
DESIGN
EFFICIENCY
ELECTRON DENSITY
ELECTRON TEMPERATURE
ION SOURCES
PLASMA PRODUCTION