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Radiofrequency hydrogen ion source with permanent magnets providing axial magnetic field

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.4849696· OSTI ID:22253194
; ; ; ;  [1]
  1. Department of Electrical Engineering, Tohoku University, Sendai 980-8579 (Japan)
Uniform axial magnetic field of about 70 G is applied to a radiofrequency (rf) hydrogen ion source by arrays of permanent magnets. The plasma density and electron temperature downstream of the source and near the magnetic filter are compared with those in the previously described ion source, where the axial field has been applied by two solenoids. The source is operated at ∼350 kHz and above 10 kW rf power with a field-effect-transistor-based invertor power supply in 1.5 Pa hydrogen. The results show that the plasma density of ∼10{sup 19} m{sup −3} near the source exit and ∼10{sup 18} m{sup −3} near the magnetic filter can be obtained, which are higher than those with the solenoids.
OSTI ID:
22253194
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 85; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English

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