Radio frequency ion source operated with field effect transistor based radio frequency system
Journal Article
·
· Review of Scientific Instruments
- Department of Electrical Engineering, Tohoku University, Sendai 980-8759 (Japan)
- National Institute for Fusion Science, Toki 509-5292 (Japan)
Characteristics of radio frequency (RF) plasma production are investigated using a field effect transistor inverter power supply as an RF wave source. With the frequency of around 0.3 MHz, an electron density over 10{sup 18} m{sup -3} is produced in argon plasma. Although lower densities are obtained in hydrogen plasma, it drastically increased up to 5x10{sup 18} m{sup -3} with an axial magnetic field of around 100 G applied in the driver region. Effects of the magnetic field and gas pressure are investigated in the RF produced plasma with the frequency of several hundred kilohertz.
- OSTI ID:
- 22053863
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 81; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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