Vacuum barrier for excimer lasers

Patent Application · Wed Oct 10 00:00:00 EDT 1990

OSTI ID:5126182

Shurter, R P

This invention is comprised of a barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yearns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.

• Research Organization: Los Alamos National Lab., NM (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Dept. of Energy
• Patent Number(s): PATENTS-US-A7596154
• Application Number: ON: DE92016382; PPN: US 7-596154
• OSTI ID: 5126182
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
EXCIMER LASERS
VENTILATION BARRIERS
DESIGN
COMPOSITE MATERIALS
COPPER
ELECTRON BEAMS
EPOXIDES
FIBERS
FOILS
GRAPHITE
IMIDES
INVENTIONS
VACUUM SYSTEMS
BEAMS
CARBON
ELEMENTAL MINERALS
ELEMENTS
GAS LASERS
LASERS
LEPTON BEAMS
MATERIALS
METALS
MINERALS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC OXYGEN COMPOUNDS
PARTICLE BEAMS
TRANSITION ELEMENTS
426002* - Engineering- Lasers & Masers- (1990-)