Vacuum barrier for excimer lasers

Patent · 15 September 1992

OSTI ID:7232712

Shurter, R P

A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput. 3 figs.

• DOE Contract Number: W-7405-ENG-36
• Assignee: Dept. of Energy, Washington, DC (United States)
• Patent Number(s): US 5147711; A
• Application Number: PPN: US 7-596154
• OSTI ID: 7232712
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426002* -- Engineering-- Lasers & Masers-- (1990-)
COMPOSITE MATERIALS
DESIGN
EXCIMER LASERS
FLUIDS
GAS LASERS
GASES
LASERS
MATERIALS
VACUUM SYSTEMS