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Title: Control of zirconia surface phases in annealed alumina with Y/sup +//Zr/sup +/ implantation ratios

Journal Article · · Journal of Materials Engineering; (USA)
DOI:https://doi.org/10.1007/BF02834462· OSTI ID:5123985
;  [1]; ;  [2]
  1. Georgia Inst. of Tech., Atlanta, GA (USA). School of Material Engineering
  2. Ionic Atlanta, Inc., Atlanta, GA (US)

The authors discuss an effort to transformation toughen alumina surfaces, in which Y/sup +/ was implanted in sapphire previously implanted with Zr/sup +/ at a dose of 1.25 x 10/sup 17/ ions/cm/sup 2/. The Y/sup +/ implant doses ranged from 1 to 10 x 10/sup 15/ ions/cm/sup 2/ and the double implants were labelled Y/sup +//Zr/sup +//Al/sub 2/O/sub 3/. Annealing in the air at 1400{sup 0}C produced a uniform surface film of polycrystalline ZrO/sub 2/ doped with Y/sub 2/O/sub 3/ which had a grain size of 0.1 to 1.0 {mu}m. From x-ray diffraction (XRD), the ZrO/sub 2/ phases transitioned from monoclinic to tetragonal to cubic as the Y/sub 2/O/sub 3/ content increased from 0 to 4 m/o based ion zirconia content. Obtaining only cubic zirconia was surprising, because pure cubic ZrO/sub 2/ should result only above 9.2 m/o Y/sub 2/O/sub 3/. The ratios of Y to Zr measured by electron spectroscopy for chemical analysis (ESCA) depth profiling for the high dose Y/sup +/ implant was equivalent to 10 m/o Y/sub 2/O/sub 3/ in ZrO/sub 2/ rather than the implanted ratio of 4 m/o. The higher than expected Y concentrations agreed with the XRD results and were probably produced by Zr removal by ion milling during the high Zr/sup +/ dose implant. Surface fracture toughness, as measured by indentation, decreased as yttria content increased because elimination of monoclinic ZrO/sub 2/ from the precipitate phases prevented a surface compression layer created by the tetragonal to monoclinic ZrO/sub 2/ transition on cooling from annealing temperatures.

OSTI ID:
5123985
Journal Information:
Journal of Materials Engineering; (USA), Vol. 11:2; ISSN 0931-7058
Country of Publication:
United States
Language:
English

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