The role of hydrogen in the nucleation and growth of diamond films
Technical Report
·
OSTI ID:510579
Results are presented on diamond film growth from methane/argon/hydrogen discharges at 100 torr total pressure as a function of hydrogen partial pressure over the range 0.5-0.08 H-atom fraction. Results are discussed in terms of a transition from a frequently discussed methyl radical growth regime to a C{sub 2} growth regime.
- Research Organization:
- Argonne National Lab., IL (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 510579
- Report Number(s):
- ANL/CHM/PP--90738; ON: DE97007874
- Country of Publication:
- United States
- Language:
- English
Similar Records
Studies of chemical vapor deposition of diamond films in carbon/hydrogen and carbon/hydrogen/halogen systems
Determination of diamond growth rate in a flow tube geometry as a function of measured atomic hydrogen density
Polycrystal diamond growth in a microwave plasma torch
Thesis/Dissertation
·
Thu Dec 30 23:00:00 EST 1993
·
OSTI ID:146906
Determination of diamond growth rate in a flow tube geometry as a function of measured atomic hydrogen density
Journal Article
·
Wed May 01 00:00:00 EDT 1996
· Journal of Vacuum Science and Technology, A
·
OSTI ID:285366
Polycrystal diamond growth in a microwave plasma torch
Journal Article
·
Tue Dec 14 23:00:00 EST 2010
· Plasma Physics Reports
·
OSTI ID:21443312