Customized Auger data analysis and display using the Physical Electronics Model 595 Auger spectrometer
This report describes how customized data processing with the Physical Electronics MACS computer automation system and optional FORTRAN Linker Package can improve and simplify data display and quantitative analysis of Auger spectra acquired using the Physical Electronics Model 595 Scanning Auger Multiprobe. Techniques described are especially suited to the analysis of a series of spectra with similar data acquisition parameters and eliminate the repetitive steps necessary using the standard format of the manufactures software. Data quantification routines have a greatly improved capability to analyze closely spaced peaks (such as Cr and O), small peaks near the limit of detectability, and peaks that are changing during ion sputtering. All routines use the graphics display terminal and computer included in the MACS system, and no additional computer hardware is required.
- Research Organization:
- Knolls Atomic Power Lab., Schenectady, NY (USA)
- DOE Contract Number:
- AC12-76SN00052
- OSTI ID:
- 5083773
- Report Number(s):
- KAPL-4189; ON: DE86002020
- Country of Publication:
- United States
- Language:
- English
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