CARS (coherent anti-Stokes Raman spectroscopy) detection of gaseous species for diamond deposition process

Conference · Sun Jan 01 04:00:00 EST 1989 · Preprints of Papers, American Chemical Society, Division of Fuel Chemistry; (USA)

OSTI ID:5043696

Roman, W C; Eckbreth, A C ^[1]

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1. Propulsion Science Lab., Hartford, CT (USA)

In order to understand the complicated chemical and physical processes that occur during the deposition of hard face coatings such as diamond, diagnostics that are remote, nonintrusive and sensitive to potential chemical species are necessary. One particularly promising approach is coherent anti-Stokes Raman spectroscopy (CARS) useful for measurements of temperature and species concentrations. Results to be described will include CARS measurements on a PACVD reactor used for depositing high quality diamond films. A mixture of acetylene (C{sub 2}H{sub 2}) and Argon, tested over a range of total pressures down to 0.1 Torr, was used to calibrate the CARS system. With the existing CARS system, detectivity of C{sub 2}H{sub 2} to 5 mtorr was demonstrated. This paper describes details of the scanned narrowband colinear CARS system and examples of CARS spectra obtained for CH{sub 4} and C{sub 2}H{sub 2} species under rf PACVD diamond deposition conditions and also using an alternate filament assisted technique.

• OSTI ID: 5043696
• Report Number(s): CONF-8904168--
• Conference Information: Journal Name: Preprints of Papers, American Chemical Society, Division of Fuel Chemistry; (USA) Journal Volume: 34:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
CARBON
DATA
DEPOSITION
DIAMONDS
ELEMENTAL MINERALS
ELEMENTS
EXPERIMENTAL DATA
FILAMENTS
FILMS
FLUIDS
GASES
INFORMATION
LASER SPECTROSCOPY
MEASURING METHODS
MINERALS
NONMETALS
NUMERICAL DATA
PLASMA
RAMAN SPECTRA
RAMAN SPECTROSCOPY
SPECTRA
SPECTROSCOPY
THIN FILMS