Chemical vapor deposition and photochemical vapor deposition of amorphous silicon photovoltaic devices

Technical Report · Wed Nov 01 00:00:00 EST 1989

DOI:https://doi.org/10.2172/5042415· OSTI ID:5042415

Baron, B. N.; Rocheleau, R. E.; Hegedus, S. S. ^[1]

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1. Delaware Univ., Newark, DE (USA). Inst. of Energy Conversion

The objectives of this research were to study, develop and assess chemical and photochemical vapor deposition as alternate deposition methods for the fabrication of amorphous silicon thin-film photovoltaic solar cells to meet the performance and cost goals of the National Photovoltaics Program. 53 refs., 37 figs., 18 tabs.

• Research Organization: Solar Energy Research Inst. (SERI), Golden, CO (United States); Delaware Univ., Newark, DE (USA). Inst. of Energy Conversion
• Sponsoring Organization: DOE/CE
• DOE Contract Number: AC02-83CH10093
• OSTI ID: 5042415
• Report Number(s): SERI/STR-211-3601; ON: DE89009510; CNN: XB-4-040601
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
14 SOLAR ENERGY
SILICON SOLAR CELLS
CHEMICAL VAPOR DEPOSITION
ABSORPTION
AMORPHOUS STATE
BORON
COMPARATIVE EVALUATIONS
COMPUTERIZED CONTROL SYSTEMS
ELECTRICAL PROPERTIES
ENERGY EFFICIENCY
EXPERIMENTAL DATA
FABRICATION
FEEDBACK
FLOW RATE
FUNCTIONAL MODELS
HYDROGEN
MATERIALS TESTING
MERCURY
OPTICAL PROPERTIES
PERFORMANCE TESTING
PHOTOCHEMISTRY
PROGRESS REPORT
PYROLYSIS
TECHNOLOGY ASSESSMENT
TEMPERATURE EFFECTS
THIN FILMS
VAPORS
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMISTRY
CONTROL SYSTEMS
DATA
DECOMPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
DOCUMENT TYPES
EFFICIENCY
ELEMENTS
EQUIPMENT
FILMS
FLUIDS
GASES
INFORMATION
METALS
NONMETALS
NUMERICAL DATA
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
TESTING
THERMOCHEMICAL PROCESSES
360601* - Other Materials- Preparation & Manufacture
140501 - Solar Energy Conversion- Photovoltaic Conversion