Effect of alkaline-earth fluorides on the nitridation of silicon
Journal Article
·
· Mater. Res. Bull.; (United States)
Effects of one per cent of alkaline earth fluorides (BaF/sub 2/, CaF/sub 2/, SrF/sub 2/) on the first stage nitridation of silicon have been studied. The fluorides enhance the reaction rate and change the parabolic kinetics for silicon-nitrogen reaction to a linear kinetics. The accelerating effect being in the order BaF/sub 2/ > CaF/sub 2/ > SrF/sub 2/ with activation energies of 96.23, 146.44 and 251.04 kJ/mole, respectively, as compared to 385.43 kJ/ mole for silicon-nitrogen reaction without additive. Thermodynamic considerations reveal that the fluorides accelerate the reaction by removing the SiO/sub 2/ layer formed on the silicon grain.
- Research Organization:
- Central Glass and Ceramic Research Institute, Jadavpur University, Calcutta
- OSTI ID:
- 5041768
- Journal Information:
- Mater. Res. Bull.; (United States), Journal Name: Mater. Res. Bull.; (United States) Vol. 4; ISSN MRBUA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ACTIVATION ENERGY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM FLUORIDES
CALCIUM COMPOUNDS
CALCIUM FLUORIDES
CALCIUM HALIDES
CHALCOGENIDES
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
ELEMENTS
ENERGY
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
KINETICS
NITRIDATION
OXIDES
OXYGEN COMPOUNDS
REACTION KINETICS
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
STRONTIUM COMPOUNDS
STRONTIUM FLUORIDES
THERMODYNAMICS
360601* -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ACTIVATION ENERGY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM FLUORIDES
CALCIUM COMPOUNDS
CALCIUM FLUORIDES
CALCIUM HALIDES
CHALCOGENIDES
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
ELEMENTS
ENERGY
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
KINETICS
NITRIDATION
OXIDES
OXYGEN COMPOUNDS
REACTION KINETICS
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
STRONTIUM COMPOUNDS
STRONTIUM FLUORIDES
THERMODYNAMICS