ECR apparatus with magnetic coil for plasma refractive index control

Patent · Tue Apr 26 00:00:00 EDT 1994

OSTI ID:5006252

Berry, L A

The present invention describes a technique to control the radial profile of microwave power in an ECR plasma discharge. In order to provide for a uniform plasma density to a specimen, uniform energy absorption by the plasma is desired. By controlling the radial profile of the microwave power transmitted through the microwave window of a reactor, the profile of the transmitted energy to the plasma can be controlled in order to have uniform energy absorption by the plasma. An advantage of controlling the profile using the window transmission characteristics is that variations to the radial profile of microwave power can be made without changing the microwave coupler or reactor design. 9 figures.

• DOE Contract Number: AC05-84OR21400
• Assignee: Sematech, Inc., Austin, TX (United States)
• Patent Number(s): US 5306985; A
• Application Number: CNN: ERD-89-876; PPN: US 7-916317
• OSTI ID: 5006252
• Resource Relation: Patent File Date: 17 Jul 1992
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Fu
PLASMA
REFRACTIVE INDEX
THERMONUCLEAR REACTORS
MICROWAVE EQUIPMENT
CONTROL
ENERGY ABSORPTION
ENERGY TRANSFER
WINDOWS
ABSORPTION
ELECTRONIC EQUIPMENT
EQUIPMENT
OPENINGS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
SORPTION
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