Dual tunneling-unit scanning tunneling microscope for length measurement based on crystalline lattice
- Kanagawa Academy of Science and Technology, 3-2-1 Sakado, Takatsu-ku, Kawasaki 213 (Japan)
A dual tunneling-unit scanning tunneling microscope (DTU STM) was developed for nm order length measurement with wide scan range. The crystalline lattice of highly oriented pyrolitic graphite (HOPG) was used as reference scale. A reference unit was set up on top of a test unit. The reference sample holder and the probe tip of test unit were attached to one single XY scanner on either surface, while the test sample holder was open. This enables simultaneous acquisition of wide images of HOPG and test sample. The length in test sample image was measured by counting the number of HOPG lattices. An inchworm actuator and an impact drive mechanism were introduced to roughly position probe tips. The XY scanner was designed to be elastic to eliminate image distortion. Some comparison experiments using two HOPG chips were carried out in air. The DTU STM is confirmed to be a stable and more powerful device for length measurement which has nanometer accuracy when covering a wide scan range up to several micrometers, and is capable of measuring comparatively large and heavy samples. {copyright} {ital 1997 American Vacuum Society.}
- OSTI ID:
- 488756
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 15, Issue 1; Other Information: PBD: Jan 1997
- Country of Publication:
- United States
- Language:
- English
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