Hollow-core screw dislocations in 6H-SiC single crystals: A test of Frank`s theory

Journal Article · Sat Mar 01 04:00:00 EST 1997 · Journal of Electronic Materials

DOI:https://doi.org/10.1007/s11664-997-0138-0· OSTI ID:484476

Si, W; Dudley, M ^[1]; Glass, R; Tsvetkov, V; Carter, C Jr ^[2]

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1. State Univ. of New York, Stony Brook, NY (United States)
2. Cree Research Inc., Durham, NC (United States)

Hollow-core screw dislocations, also known as `micropipes`, along the [0001] axis in 6H-SiC single crystals, have been studied by synchrotron white beam x-ray topography (SWBXT), scanning electron microscopy (SEM), and Nomarski optical microscopy (NOM). Using SWBXT, the magnitude of the burgers vector of screw dislocations has been determined by measuring the following four parameters: (1) the diameter of dislocation images in back-reflection topographs; (2) the width of bimodal dislocation images in transmission topographs; (3) the magnitude of the tilt of lattice planes on both sides of dislocation core in projection topographs; and (4) the magnitude of the tilt of lattice planes in section topographs. The four methods show good agreement. The burgers vector magnitude of screw dislocations, b, and the diameter of associated micropipes, D, were fitted to Frank`s prediction for hollow-core screw dislocations: D = {mu}b{sup 2}/4{pi}{sup 2}{gamma}, where {mu} is shear modulus, and {gamma} is specific surface energy. 15 refs., 17 figs.

• Sponsoring Organization: USDOE
• OSTI ID: 484476
• Journal Information: Journal of Electronic Materials, Journal Name: Journal of Electronic Materials Journal Issue: 3 Vol. 26; ISSN JECMA5; ISSN 0361-5235
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
99 GENERAL AND MISCELLANEOUS
BURGERS VECTOR
MICROSTRUCTURE
MONOCRYSTALS
SCANNING ELECTRON MICROSCOPY
SCREW DISLOCATIONS
SILICON CARBIDES
STATISTICS
TESTING