SPUTTERING OF POLYCRYSTALLINE METALS BY INERT GAS IONS OF LOW ENERGY (100- 1000 eV)
Cathode sputtering yields are reported for polycrystalline copper, iron, molybdenian, and nickel bombarded with monoenergetic argon, krypton, neon, and xenon positive ions having energies ranging from 100 to 1000 ev. The sputtering yields are calculated from the weight loss of a 0.7 cm diameter spherical target, immersed in a low pressure plasma, and from the quanity of charge arriving on the target. The ion current density amounted to about 1.5 ma/cm/sup 2/. The measured yields are independent of ion current density and sputtering time; this means that there is no considerable influence of surface impurities. (N.W.R.)
- Research Organization:
- Universiteit, Utrecht
- NSA Number:
- NSA-15-031416
- OSTI ID:
- 4840386
- Journal Information:
- Physica, Journal Name: Physica Vol. Vol: 27
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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