CATHODE SPUTTERING IN INERT-GAS GLOW DISCHARGES
Journal Article
·
· Brit. J. Appl. Phys.
Measurements were made of the rate of deposition of sputtered molybdenum films in abnormal glow discharge in inert gases at 3 to 21 mm Hg as a function of the gas pressure p and the current i through the discharge tube. The rate of sputterihg was found to be proportional to (i/p)/sup 2.5/ in both neon and the Penning mixture 99% neon - 1% argon. In helium, sputtering was negligible, but the addition of only a trace of neon caused appreciable sputtering to occur. (auth)
- Research Organization:
- Mullard Research Labs., Salfords, Redhill, Surrey, Eng.
- NSA Number:
- NSA-15-031369
- OSTI ID:
- 4839866
- Journal Information:
- Brit. J. Appl. Phys., Journal Name: Brit. J. Appl. Phys. Vol. Vol: 12
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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