Fabrication of field emission display prototype based on Si field emission arrays with diamond coating

Journal Article · Fri Feb 28 23:00:00 EST 1997 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.589596· OSTI ID:477542

Givargizov, E I; Zhirnov, V V ^[1]; Chubun, N N ^[2]; Stepanova, A N ^[1]

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1. Institute of Crystallography, 117333 Moscow, (Russia), CIS
2. ISTOK RD Corporation, 141120 Fryazino, (Russia), CIS 1011

A new concept of field emission display (FED) based on ungated silicon field emission arrays with diamond coating is proposed. FED prototypes have been fabricated and tested in dc and pulse modes. Sufficiently bright light emission was observed at an anode-to-cathode voltage of 200{endash}300 V. {copyright} {ital 1997 American Vacuum Society.}

• OSTI ID: 477542
• Report Number(s): CONF-9607192--
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 2 Vol. 15; ISSN 0734-211X; ISSN JVTBD9
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
CATHODES
COATINGS
DIAMONDS
ELECTRON EMISSION
FABRICATION
FIELD EMISSION
PANELS
SILICON