Nanofabrication with the Scanning Tunneling Microscope

Technical Report · Wed Nov 30 23:00:00 EST 1988

DOI:https://doi.org/10.2172/476650· OSTI ID:476650

Shedd, G. M.; Russell, P. E.

The Precision Engineering Center has recently begun a research program into applications of STM to Nanotechnology. Few tools permit humans to control events and processes at the manometer level, and of those, the STM is the most well-suited to the task. A versatile new ultra-high-vacuum (UHV) STM is being built to study the use of STM for the manipulation of nanometer-scale particles. Part of the STM`s usefulness will be due to its being positioned directly beneath the focused ion beam (FIB). The interface of the STM with the FIB will allow the STM to take advantage of the FIB for long-range imaging and as a particle source; the FIB can in turn use the STM for in situ, high-resolution imaging of micromachined features.

• Research Organization: Los Alamos National Lab., NM (United States); North Carolina State Univ., Raleigh, NC (United States)
• OSTI ID: 476650
• Report Number(s): LA-SUB--93-81; ON: DE97003578
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM FLUORIDES
CALCIUM FLUORIDES
FABRICATION
FOCUSING
GOLD
ION BEAMS
MACHINING
RESEARCH PROGRAMS
SCANNING ELECTRON MICROSCOPY