The sputter generation of negative ion beams
A brief review is given of recent progress toward a quantitative understanding of negative ion formation by sputtering from surfaces covered with fractional layers of highly electropositive adsorbates. Practical models developed for estimating changes in work functions {Delta}{phi} by electropositive adsorbates are described. The secondary negative ion generation process is examined through the use of composite energy/velocity dependent analytical models. These models are used to illustrate the effect of work function on the energy distributions of negative ions sputter ejected from a polycrystalline molybdenum surface covered with fractional layers of cesium. Predictions are also made of the functional dependence of the probability for negative ion formation on cesium coverage. The models predict energy distributions which are in basic disagreement with experimental observations, implying their inappropriateness for describing the sputter negative ion generation process. We have also developed a model for calculating sputter ratios based on the use of simple scaling procedures to bring Sigmund theory into close agreement with experimental observation accounting for the threshold effect. Scaling factors for projectile energies E > 1000 eV are found to be independent of energy while those for projectile energies E{sub th} < E < 1000 eV were found to be energy dependent. In this study, the model and scaling techniques utilized to bring Sigmund theory into agreement with experiment are discussed in detail and several examples provided which illustrate the versatility, accuracy and utility of the model. In the present report, we describe the model and apply it to the case of sputtering a selected number of metals with energetic cesium ions. In particular, we present sputter ratio information for a number of Cs-projectile/metal-target combinations; the targets are bombarded at normal incidence to the surface.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC05-96OR22464
- OSTI ID:
- 471391
- Report Number(s):
- CONF-9611167-1; ON: DE97006060; TRN: 97:010416
- Resource Relation:
- Conference: Symposium on beam engineering of advanced materials synthesis, Tokyo (Japan), 18-22 Nov 1996; Other Information: PBD: 1996
- Country of Publication:
- United States
- Language:
- English
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