A 3-axis force balanced accelerometer using a single proof-mass
Conference
·
OSTI ID:471355
- Univ. of California, Berkeley, CA (United States)
- Sandia National Lab., Albuquerque, NM (United States)
This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 471355
- Report Number(s):
- SAND-97-0764C; CONF-970646-1; ON: DE97004537; TRN: 97:003088
- Resource Relation:
- Conference: 9. international conference on solid-state sensors and actuators, Chicago, IL (United States), 16-19 Jun 1997; Other Information: PBD: 1997
- Country of Publication:
- United States
- Language:
- English
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