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UV Raman studies on CVD diamond: New information and development of in situ monitor for diamond growth

Conference ·
OSTI ID:466522

We have for the first time excited the Raman spectrum of diamond and chemical vapor deposition (CVD) diamond films in the UV within the diamond bandgap at 228.9 nm. The lack of fluorescence in the UV excited Raman spectrum of diamond and CVD diamond films allows Raman spectroscopy for the first time to monitor the carbon-hydrogen (C-H) stretching vibrations of the non-diamond components of the CVD film as well as the third order phonon bands of diamond. The relative intensity of the C-H stretching bands at ca. 2930 cm{sup -1} to the diamond first order phone band at 1332 cm{sup -1} is proportional to the atomic fraction of covalently bound hydrogen in the CVD diamond film. The third order phonon band intensity and frequency maxima are very sensitive to the size of the diamond crystallite, its intensity decreases and the maximum shifts to lower frequency as the size of the diamond crystallite decreases. We show here that UV Raman diamond measurements have significantly greater information content than visible Raman measurements.

OSTI ID:
466522
Report Number(s):
CONF-951017--
Country of Publication:
United States
Language:
English

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