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Title: Secondary ionic emission and nuclear reactions to determine the parameters in the manufacture of a planar transistor

Journal Article · · J. Radioanal. Chem., v. 12, no. 1, pp. 353-366
DOI:https://doi.org/10.1007/BF02521001· OSTI ID:4472053

Research Organization:
CEN, Grenoble, France
Sponsoring Organization:
USDOE
NSA Number:
NSA-28-000029
OSTI ID:
4472053
Journal Information:
J. Radioanal. Chem., v. 12, no. 1, pp. 353-366, Other Information: International meeting on chemical analysis by charged particle bombardment; Namur, Belgium (6 Sep 1971). Orig. Receipt Date: 31-DEC-73
Country of Publication:
Country unknown/Code not available
Language:
English