Improvement of the NO{sub x} sensitivity of WO{sub 3}-based thin-film gas sensors

Conference · Tue Dec 31 04:00:00 EST 1996

OSTI ID:441244

Yoo, Kwang Soo ^[1]; Kim, Tae Song ^[2]

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1. Seoul City Univ. (Korea, Republic of)
2. Korea Inst. of Science and Technology, Seoul (Korea, Republic of)

The WO{sub 3} thin-film NO{sub x} sensor which is of practical use was newly fabricated. Recently, the primary source of air pollution in great cities has been changed from plant smokes to automobile exhausting gases. The exhausting gases are mainly consisted of unburned hydrocarbon (CH{sub x}), nitrogen oxide (NO{sub x}), and carbon monoxide (CO). Among them, the NO{sub x} is very poisonous to the human body (safety limit: NO{sub 2}; 3 ppm, NO; 25 ppm), and provides smog in summer. In order to reduce the concentration of NO{sub x} among exhaust gases, a NO{sub x} sensor is needed with the high sensitivity and fast response which can monitor and control the NO{sub x} concentration of a few ppm or sub-ppm order. Accordingly, the objective of the present study is to fabricate the NO{sub x} sensor using undoped, Pd or Pt doped-WO{sub 3} thin films as a sensing layer, and investigate the best NO{sub x}-sensing materials and the optimum processing condition.

• OSTI ID: 441244
• Report Number(s): CONF-960782--
• Country of Publication: United States
• Language: English

Related Subjects

20 FOSSIL-FUELED POWER PLANTS
33 ADVANCED PROPULSION SYSTEMS
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
54 ENVIRONMENTAL SCIENCES
CRYSTAL DOPING
DESIGN
MEASURING INSTRUMENTS
MONITORING
NITROGEN OXIDES
PALLADIUM
PERFORMANCE
PLATINUM
THIN FILMS
TUNGSTEN OXIDES