Radiation gauge to measure the thickness of very thin film. I (in Japanese)
Journal Article
·
· Kumamoto Daigaku Kyoikugakubu Kiyo, Shizenkagaku, no. 20, pp. 1-6
OSTI ID:4333218
Characteristics of a BETA -ray backscatter thickness gage were investigated using /sup 14/C as the radiation source. The results of the analysis show that the gage of this type is useful especially for the measurement of the thickness of thin metal films produced by vacuum evaporation. (auth)
- Research Organization:
- Kumamoto Univ., Japan
- NSA Number:
- NSA-29-029558
- OSTI ID:
- 4333218
- Journal Information:
- Kumamoto Daigaku Kyoikugakubu Kiyo, Shizenkagaku, no. 20, pp. 1-6, Journal Name: Kumamoto Daigaku Kyoikugakubu Kiyo, Shizenkagaku, no. 20, pp. 1-6; ISSN KDDSA
- Country of Publication:
- Japan
- Language:
- Japanese
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