Evaluating mechanical properties of thin layers using nanoindentation and finite-element modeling: Implanted metals and deposited layers
Conference
·
OSTI ID:431184
- and others
We present a methodology based on finite-element modeling of nanoindentation data to extract reliable and accurate mechanical properties from thin, hard films and surface-modified layers on softer substrates. The method deduces the yield stress, Young`s modulus, and hardness from indentations as deep as 50% of the layer thickness.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 431184
- Report Number(s):
- SAND--96-1682C; CONF-961202--22; ON: DE97002460
- Country of Publication:
- United States
- Language:
- English
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