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Finite-element modeling of nanoindentation

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.369178· OSTI ID:295502
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  1. Sandia National Laboratories, Albuquerque, New Mexico 87185-1056 (United States)

Procedures have been developed based on finite-element modeling of nanoindentation data to obtain the mechanical properties of thin films and ion-beam-modified layers independently of the properties of the underlying substrates. These procedures accurately deduce the yield strength, Young{close_quote}s elastic modulus, and layer hardness from indentations as deep as 50{percent} of the layer thickness or more. We have used these procedures to evaluate materials ranging from ion implanted metals to deposited, diamond-like carbon layers. The technique increases the applicability of indentation testing to very thin layers, composite layers, and modulated compositions. This article presents an overview of the procedures involved and illustrates them with selected examples. {copyright} {ital 1999 American Institute of Physics.}

OSTI ID:
295502
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 3 Vol. 85; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English