Deposition of diamond-like carbon films with intense ion beams
- Los Alamos National Lab., NM (United States)
- Univ. of New Mexico, Albuquerque, NM (United States). Dept. of Chemical Engineering
- SI Diamond Inc., Houston, TX (United States)
- Sandia National Labs., Albuquerque, NM (United States)
- Cornell Univ., Ithaca, NY (United States). Dept. of Materials Science and Engineering
- Lehigh Univ., Bethlehem, PA (United States). Dept. of Materials Science and Engineering
Thin film deposition by ion beam evaporation is being studied at Los Alamos with an intense light ion beam generated in a focused applied-Br magnetically-insulated ion diode. H, C, and O ions are extracted from the Lucite flashover anode. The diode is powered directly by a Marx generator. For these first experiments, typical beam parameters are: 0.4 MV, 35 kA, 0.5-{mu}s pulsewidth. The beam is being used to produce and evaluate carbon films for use in field-emissive flat-panel displays. The films have been prepared by ablation of graphite targets with a 4 kJ ion beam focused to 30 {+-} 15 J/cm{sup 2}. Approximately 10 mg of material is ablated per pulse roughly consistent with a 1-D deposition and heat transport model. Films are deposited onto Si (100) and glass substrates. The films are fairly smooth with deposition rates as high as 50 nm/pulse. Four-point measurements give electrical resistivities of 10 to 100 {Omega}-cm, 10{sup 4} to 10{sup 5} times higher than graphite. Current-voltage measurements show good electron emission with Fowler-Nordheim scaling. X-ray diffraction shows no crystalline structure, while scanning electron microscopy reveals 100-nm feature sizes with a few 1-{mu}m particles. Raman spectroscopy and electron energy loss spectroscopy indicate that the films contain significant sp{sup 3} bonding. Glassy carbon is also produced under some conditions. Time-resolved photographs of ablation plume expansion will be presented. Also, time-resolved measurements of plume energy input to the substrates, using thin-film platinum resistive elements, have been made and will be presented.
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 42982
- Report Number(s):
- CONF-940604--; ISBN 0-7803-2006-9
- Country of Publication:
- United States
- Language:
- English
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