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Application of autoradiography to the investigation of new doping techniques of semiconductor materials

Journal Article · · Isotopenpraxis, v. 10, no. 5, pp. 170-173
;
Research Organization:
Inst. of Nuclear Research, Warsaw
Sponsoring Organization:
USDOE
NSA Number:
NSA-30-018556
OSTI ID:
4296346
Journal Information:
Isotopenpraxis, v. 10, no. 5, pp. 170-173, Journal Name: Isotopenpraxis, v. 10, no. 5, pp. 170-173; ISSN IPRXA
Country of Publication:
Country unknown/Code not available
Language:
English

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Related Subjects

*AUTORADIOGRAPHY-- SEMICONDUCTOR MATERIALS
*SEMICONDUCTOR MATERIALS-- AUTORADIOGRAPHY
DIFFUSION
DOPED MATERIALS
GOLD 198
ION IMPLANTATION
N42400* --Engineering--Materials Testing
PHOSPHORUS 32
SILICON