MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

Conference · Mon Mar 08 23:00:00 EST 1999

OSTI ID:4257

Allen, J ^[1]; Sacks, E

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1. Sandia National Laboratories

We have developed an interactive computer-aided design program that supports mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and supports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.

• Research Organization: Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 4257
• Report Number(s): SAND99-0006C
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
99 GENERAL AND MISCELLANEOUS
COMPUTER-AIDED DESIGN
COMPUTERIZED SIMULATION
CONFIGURATION
DEFECTS
MICROELECTRONICS
MINIATURIZATION
PARAMETRIC ANALYSIS
PERFORMANCE
VALIDATION