Effects of the substrate temperature on sputter-deposited Niobium films

Journal Article · Wed Oct 01 04:00:00 EDT 1975 · J. Low Temp. Phys., v. 21, no. 1/2, pp. 169-177

DOI:https://doi.org/10.1007/BF01141296· OSTI ID:4190139

Saito, Y; Anayama, T

The superconducting transition temperatures and the structural properties of Nb films prepared by sputtering were studied over a deposition temperature range of -130 to 700$sup 0$C. Niobium films show a preferred orientation in the [110] direction perpendicular to the substrate surface. The transition temperatures of Nb films deposited onto cryogenic substrates were greatly reduced. A close correspondence between the d spacing d$sub 110$ and superconducting T/sub c/ has been found. The T/sub c/ of Nb films decreases rapidly with increasing spacing d$sub 110$. (auth)

• Research Organization: Yamanashi Univ., Kofu, Japan
• Sponsoring Organization: USDOE
• NSA Number: NSA-33-001294
• OSTI ID: 4190139
• Journal Information: J. Low Temp. Phys., v. 21, no. 1/2, pp. 169-177, Journal Name: J. Low Temp. Phys., v. 21, no. 1/2, pp. 169-177; ISSN JLTPA
• Country of Publication: United States
• Language: English

Related Subjects

*NIOBIUM-- TRANSITION TEMPERATURE
360102* --Materials--Metals & Alloys--Structure & Phase Studies
FILMS
N50230* --Metals
Ceramics
& Other Materials--Metals & Alloys--Properties
Structure & Phase Studies
N66200 --Physics (Low Temperature)--Superconductivity
ORIENTATION
SPUTTERING
SUBSTRATES
SUPERCONDUCTIVITY
TEMPERATURE DEPENDENCE
X-RAY DIFFRACTION