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Shallow dopants and the role of hydrogen in epitaxial layers of gallium nitride (GaN)

Book ·
OSTI ID:417636
; ;  [1]; ; ;  [2]
  1. Xerox Palo Alto Research Center, CA (United States)
  2. Hewlett Packard Co., San Jose, CA (United States)

Shallow donors and acceptors were characterized by photoluminescence spectroscopy and variable temperature Hall effect measurements for Si-doped and Mg-doped GaN epitaxial layers, respectively, grown by metalorganic chemical vapor deposition. Si doping introduces a donor state located {approximately} 23 meV below the conduction band minimum. Results from secondary ion mass spectroscopy confirm that the shallow donor level in the unintentionally doped GaN as well as in Si-doped GaN is due to Si. The electrical and photoluminescence properties of Mg-doped GaN are dominated by an acceptor level located {approximately} 0.2 eV above the valence band edge which results from Mg atoms substituting for Ga. Hydrogen is implicated in the low doping efficiency of acceptors in as-grown Mg-doped GaN by results from remote-plasma hydrogenation and acceptor activation experiments. The activation of acceptors in Mg-doped GaN is consistent with the dissociation of electrically inactive acceptor-hydrogen complexes rather than the removal of compensating donors. 23 refs., 4 figs., 2 tabs.

OSTI ID:
417636
Report Number(s):
CONF-960502--; ISBN 1-56677-163-3
Country of Publication:
United States
Language:
English