Porous silicon gettering
- National Renewable Energy Lab., Golden, CO (United States); and others
The authors have studied a novel extrinsic gettering method that uses the large surface areas produced by a porous-silicon etch as gettering sites. The annealing step of the gettering used a high-flux solar furnace. They found that a high density of photons during annealing enhanced the impurity diffusion to the gettering sites. The authors used metallurgical-grade Si (MG-Si) prepared by directional solidification casing as the starting material. They propose to use porous-silicon-gettered MG-Si as a low-cost epitaxial substrate for polycrystalline silicon thin-film growth.
- Research Organization:
- National Renewable Energy Lab., Golden, CO (United States)
- DOE Contract Number:
- AC36-83CH10093
- OSTI ID:
- 416137
- Report Number(s):
- NREL/TP--410-21091; CONF-960513--; ON: DE96007880
- Country of Publication:
- United States
- Language:
- English
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Porous silicon gettering
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