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Porous silicon gettering

Conference ·
; ;  [1]
  1. National Renewable Energy Lab., Golden, CO (United States); and others

The authors have studied a novel extrinsic gettering method that uses the large surface areas produced by a porous-silicon etch as gettering sites. The annealing step of the gettering used a high-flux solar furnace. They found that a high density of photons during annealing enhanced the impurity diffusion to the gettering sites. The authors used metallurgical-grade Si (MG-Si) prepared by directional solidification casing as the starting material. They propose to use porous-silicon-gettered MG-Si as a low-cost epitaxial substrate for polycrystalline silicon thin-film growth.

Research Organization:
National Renewable Energy Lab., Golden, CO (United States)
DOE Contract Number:
AC36-83CH10093
OSTI ID:
416137
Report Number(s):
NREL/TP--410-21091; CONF-960513--; ON: DE96007880
Country of Publication:
United States
Language:
English

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