Niobium microbridges for SQUID applications

Conference · Sat Mar 01 04:00:00 EDT 1975 · IEEE Trans. Magn., v. MAG-11, no. 2, pp. 782-784

OSTI ID:4127533

Holdeman, L B; Peters, P N

Niobium microbridges developed for SQUID applications are discussed. Production is reliable for superconducting films down to a thickness of 50 Angstroms using rf bias sputtering techniques. Bridge patterns of submicron width are produced through electron lithography with a scanning electron microscope/flying spot scanner combination. The transition from macroscopic leads to the microbridge is made with a multiple exposure technique. The pattern is reproduced in the superconducting niobium films by sputter etching. (auth)

• Research Organization: Space Science Lab., Marshall Space Flight Center, AL
• NSA Number: NSA-33-017102
• OSTI ID: 4127533
• Conference Information: Journal Name: IEEE Trans. Magn., v. MAG-11, no. 2, pp. 782-784
• Country of Publication: United States
• Language: English

Related Subjects

*ELECTRIC BRIDGES-- FABRICATION
*SQUID DEVICES-- ELECTRIC BRIDGES
420201* --Engineering--Facilities & Equipment--Cryogenic & Superconducting Equipment & Devices
ELECTRON BEAMS
ELECTRON MICROSCOPES
ETCHING
FILMS
N42220* --Engineering--Facilities & Equipment--Cryogenic & Superconducting Equipment & Devices
NIOBIUM
SPUTTERING